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  • 1
    Digitale Medien
    Digitale Medien
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 66 (1995), S. 1489-1491 
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: This contribution deals with reactive growth of boron-nitride films by a rf nitrogen-sputtering process from a boron-metal target; thus nitrogen is functioning both as sputter and reactive gas. Only few and superficial reports of reactive sputter depositions from a metallic boron target in various argon/nitrogen mixtures exist, compared to the number of reports on rf sputtering from a BN target. Nitrogen sputtering of boron-metal has previously not been reported. It was shown by Fourier-transform infrared (FTIR) spectroscopy that the hexagonal structure of BN exclusively was deposited. Sputter rates were measured and showed no dependence on the reactive-gas flow and only a marginal dependence on sputter-gas mixtures containing 20% of krypton, argon, or helium. The reported nitrogen-sputtering process appears to be appropriate for exploration of the key parameters for phase control in BN growth and for additional surface engineering processes such as substrate bias and post-ion bombardment. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 61 (1992), S. 1177-1179 
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Burnished graphite powders and physical vapor-deposition (PVD) coatings of layered crystalline materials such as MoSx have often been used as solid lubricants. This letter will report on a novel ion-induced modification of a graphite-powder coating on a silicon surface. Even at very low ion doses, the bombardment results in structural modifications observed as a considerable reduction in x rays reflected from the (002) sliding planes, which indicates an amorphization process. Transmission electron microscopy (TEM) studies have confirmed almost complete amorphization with 200 keV Ar ions at 1016 ions cm−2. A commercial scanning tunneling microscope (STM) was used as an advanced profilometer to study ion-induced changes in the surface morphology at the powder surface. The mechanical properties of the combined graphite-coating/silicon system were studied by nanoindentation technique, and the perspectives in ion-beam burnishing of graphite coatings will be discussed.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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