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  • 1
    Electronic Resource
    Electronic Resource
    Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms (1999)
    Springer
    Microsystem technologies 5 (1999), S. 161-165 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  For conventional micromachines, in particular, micromotion convert mechanisms, the output points of the mechanism can move horizontally when input points move in the same direction. Therefore, we have proposed a three-dimensional motion convert mechanism whose output points can move vertically when the input points move in the horizontal direction. This 2-degree-of-freedom (DOF) mechanism consists of electrostatic comb-drive actuators and a basic mechanism with large-deflective elastic hinges. In this study, the characteristics of comb-drive actuators are analyzed. The electrostatic comb-drive actuator which is made up of polyimide is fabricated by CVD, RIE, Wet etching, etc., technologies. The relationship between the input (voltage) and the output (displacement) of the drive has been analyzed both theoretically and experimentally.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050157
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  • 2
    Electronic Resource
    Electronic Resource
    Strain measurement for Raman-inactive substrates with PbO thin films using Raman Coating Method (1999)
    Springer
    Journal of materials science 34 (1999), S. 105-110 
    Details
    ISSN: 1573-4803
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract A new method of Raman spectroscopy to measure strain of Raman-inactive materials deposited with Raman-active thin films was proposed. This method is denoted as the Raman Coating Method. This is the application of Raman spectroscopy, in which thin films of PbO are deposited on the surface of resins and metals using physical vapor deposition (PVD) as the pretreatment to measure strain. The relation between peak shift of PbO thin films and tensile strain was experimentally examined. This relation was independent of the mechanical properties of materials on which PbO thin films were deposited. The residual stress in PbO thin films was also measured. The absolute values of residual stress in the films on resins were much greater than those on metals. As an application of the proposed method, the tensile strain in carbon fiber of carbon fiber reinforced plastics (CFRP) was measured by Raman spectroscopy.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1023/A:1004421826443
    Library Location Call Number Volume/Issue/Year Availability
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    Paper (German National Licenses)
    Fulltext
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