Electronic Resource
PO Box 1354, 9600 Garsington Road, Oxford OX4 2XG, UK.
:
Blackwell Science Ltd
Fatigue & fracture of engineering materials & structures
28 (2005), S. 0
ISSN:
1460-2695
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Micromachining based on metallic structural material possesses several inherent advantages. Metallic thin films can be deposited at room temperature by various means. In microelectromechanical systems they can thus be fabricated on top of polymeric sacrificial materials. The sacrificial layer is finally removed in oxygen plasma either before or after wafer dicing with no need for wet processing. However, in metallic micromachining, it is not trivial to find materials and processes producing structural layers with well-controlled and uniform mechanical characteristics. Amorphous alloys Mo–N and Mo–Si–N are investigated in this study for the purpose, showing properties superior to polycrystalline metals for microelectromechanical devices and systems applications.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1460-2695.2005.00887.x
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