ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper describes the vacuum-compatible air bearing designed with a cascadedexhaust scheme to minimize the leakage of air in a vacuum environment. The design of the airbearing, including the differential exhaust system, required great care because several designparameters, such as the number of exhaust stages, diameter and length of the exhaust tube, pumpingspeed and ultimate pressure of the vacuum pump, and seal length and gap greatly influenced theleakage of air and thus the degree of vacuum. A leakage analysis was performed to estimate thechamber pressure and an optimization method based on the genetic algorithm was proposed underseveral constraint conditions. The results showed that the degree of vacuum improved dramaticallycompared to the initial design, and that the distribution of the spatial design parameters andtechnical limit of the pumping speed were well achieved
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/53/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.339.37.pdf
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