ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The surface structures of polycrystalline pure metals bombarded with 20 ke V O+2 were observed by a SEM and their sputtered atom yields obtained by measuring the depth of crater with an interferoscope. The etch patterns produced were classified according to the binding energy of mono-oxide BMO of the target atom M and an oxygen atom; the surface become smooth as the binding energy increased. The sputtered atom yield showed similar periodicity to those obtained by noble gas ion bombardment. It was therefore concluded that the sputtered atom yield was primarily determined by physical collision of atoms in the target material and was not affected very much by the chemical reaction of implanted oxygen atoms.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740020605
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