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Hydrogen Measurements in SiN〈sub〉x〈/sub〉: H/Si Thin Films by ERDA (2007)

Ionescu , Mihail ; Richards, Bryce ; McIntosh, Keith ; [et al.]

s.l. ; Stafa-Zurich, Switzerland

Materials science forum Vol. 539-543 (Mar. 2007), p. 3551-3556

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ISSN: 1662-9752

Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics

Notes: Thin SiN film deposited on Si by plasma enhanced chemical vapour deposition(PECVD) is used for surface passivation of Si. During the PECVD process Hydrogen isincorporated into the SiN film, and the passivation properties of the resulting SiNx:H layersplay an important role in enhancing the energy conversion efficiency of solar cells. It isbelieved that the Hydrogen present in SiNx:H is responsible for this enhancement, andtherefore its concentration in the passivating layer is an important parameter. The Hydrogencomposition and its depth profile in thin SiNx:H films of 20nm to 200nm was measured byelastic recoil detection analysis (ERDA), using a 1.7MeV He+ ion beam of (1x2)mm2,generated by a high stability 2MV Tandetron ion beam accelerator. Simultaneously,Rutherford backscattering (RBS) spectra were recorded for each sample. The results showthat the Hydrogen concentration in the SiNx:H layers is dependent of the depositionconditions. Also, Hydrogen was found to be homogenously distributed across the SiNx:Hlayer thickness, and the SiNx:H/Si interfaces were well defined

Type of Medium: Electronic Resource

URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.539-543.3551.pdf

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The importance of inter-molecular forces in crystal structure analysis: Solid state study of the diag-to-lat isomerization of (η5-C5H4Me)Re(CO)2Br2 (1998)

Boeyens, Jan C. A. ; Cheng, Lin ; Coville, Neil J. ; [et al.]

Springer

Journal of chemical crystallography 28 (1998), S. 185-191

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ISSN: 1572-8854

Keywords: Isomerization ; solid state ; inter-molecular forces

Source: Springer Online Journal Archives 1860-2000

Topics: Geosciences , Physics

Notes: Abstract Single crystal X-ray structures of diag and lat-(η5-C5H4Me)Re(CO)2Br2 have been determined. The diag form crystallizes in the triclinic space group $${P\bar 1}$$ , a = 6.751(2), b = 8.537(1), c = 9.758(1) Å α = 96.70(1), β = 93.15(2), γ = 104.96(2)°, V = 534.8(2) Å3, Z = 2. The lat form is monoclinic, P21/c, a = 11.820(1), b = 7.133(1), c = 12.924(1) Å β = 98.278(8)°, V = 1078.2(2) Å3, Z = 4. The unit cell volumes (per Z) of the two isomers differ by ca 1%. Molecular modelling reveals an energy difference between the two isomers of 1 kJ mol−1 or less. The XRD powder diffraction patterns for the lat isomer produced by crystallization from solution or prepared by thermal isomerization are identical. The evidence thus suggests that the solid state isomerization reaction is a novel example of a reaction which yields a molecular structure determined by crystal packing forces.