ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
Highly compressively stressed diamond-like carbon and polymer films were used tofabricate normally closed microgrippers with diameters as small as 30~40μm. The microgrippersconsisted of a DLC layer of 30-50nm, a thin Al layer of 40nm as a heater and an SU8 layer of250~500nm, and were fabricated by a self-aligned two-mask process. Electrical tests and nonelectricaltests on a Peltier device confirmed the devices have an operation temperature of ~100°Cfor an opening angle of 90°, much lower than the ~400°C needed for previously fabricatedNi/DLC microgrippers. This value is consistent with finite element modelling and analyticalcalculation. The power needed to open the microgripper was only ~10 mW, less than half of thoseused for the previous Ni/DLC microgrippers. It has been successfully demonstrated that themicrogrippers can be used to capture and confine micro-objects using microbeads for the tests
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.48.133.pdf
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