ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A review is given of "misted" CSD deposition. This technique uses stoichiometricallycorrect sol-gel solutions but is not a spin-on process. Instead a monodisperse mist of droplets aslarge as 3 microns in diameter or as small as 0.3 microns is deposited on a substrate. Thistechnique has the great advantage over sol-gel spin-on processing in that it is suitable for nonplanarstructures, including nanotubes and nano-wires. One could coat a variety of objects with thistechnique, including anything from non-planar flash-goggles to a parabolic mirror or focal-planearray of pyroelectric detectors. Yet it is much simpler and less expensive than conventionalchemical vapour deposition (CVD). We illustrate its use with functionally graded layers onplatinised silicon wafers, on nanotubes of piezoelectrics, and most recently [Pollard, Gregg, et al.]on 100 Gbit/cm2 arrays of Pt nanowires on Si substrates (the latter are 30-nm diameter, spaced 50nm apart, embedded in porous alumina and capped with lead zirconate titanate capacitors)
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/53/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.333.71.pdf
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