ISSN:
1618-2650
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Summary Si x N y , thin layers were analyzed by AES, SIMS, ISS and RBS. A comparison of the experimental results is made, and the artifacts and characteristics for each experimental method are discussed. It seems that of all these methods, only RBS is suitable for analysing silicon nitride layers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00469176
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