Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
51 (1987), S. 1500-1502
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
It has been found that a relatively low-dose focused ion beam irradiation makes an organogold film insoluble to its solvents (e.g., trichloroethylene), resulting in submicron pattern formation. Ion beam induced, low conductivity as with resistivities of (4–4000) MΩ/(D'Alembertian) has been observed for more than 1×1015 ions/cm2 dose for a 0.65-μm-thick film. However, by heat treatment at 300 °C after low-dose ion beam patterning, gold patterns with resistivity of 3×10−4 Ω cm, which is about 100 times the bulk gold value, are obtained.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.98615
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