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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 3282-3288 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Many important classes of surface reactions exhibit both high heats of reaction and large, positive activation energies. In addition, many surface reactions often occur in thermally isolated environments. As a result, significant autothermic effects are possible. In part I of this article, a generalized model of these effects is presented which describes the enhancement in reaction rate as a function of activation energy, bulk temperature, and a parameter termed the characteristic temperature. Reactant concentration and reaction order effects are also considered. Part II of this work presents the application of this model to numerous experimental plasma etching data.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 3289-3293 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Part I of this paper presented a generalized model of heat effects operative during surface reactions. The enhancement in reaction rate due to autothermic effects was analyzed as a function of activation energy, bulk temperature, and a parameter termed the characteristic temperature. Application of this model to experimental plasma etching data is presented in part II of this work. Characteristic temperatures calculated from experimental data in numerous plasma etching systems agree closely with the critical characteristic temperature predicted by the heat of the reaction model. Possible reasons for this consistency are given. Further, the autothermic enhancement in the Ta-CF4/O2 etching system is accurately predicted as a function of reactant concentration by a heat of reaction model.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    Industrial and engineering chemistry 11 (1972), S. 579-584 
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 37 (1991), S. 671-678 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Adsorption of a strongly bound absorbate in a bidisperse-pore system is modeled using a Turner pore structure. This idealized system leads to an analytical solution for the micropore uptake of adsorption that is valid for a part of the adsorption-time profile. The analytical solution yields a well-defined criterion that establishes the boundary between an adsorption process dominated by macropore resistance and one dominated by micropore resistance. The range of the analytical solution is extended to include the entire adsorption-time profile using an approximate analytical solution and two asymptotic solutions.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 20 (1974), S. 166-171 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: The mixing characteristics of a vessel containing no moving parts have been studied theroretically and experimentally. The vessel consists of two chambers separated by a porous barrier. Mixing results because elements of fluid permeating the barrier at various distances from the inlet reside for different periods of time within the vessel and combine with other elements having entered earlier and later. An apparatus was designed a priori and experimentally verfied to give a residence-time distribution function the same as a completely mixed vessel. The method was extended to show that in principle a vessel exhibiting any residence-time distribution function can be designed by modifying the geometries of the chambers and the porous barrier.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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