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Collisional effects on the radio-frequency sheath dynamics (2001)

Qiu, Hua-Tan ; Wang, You-Nian ; Ma, Teng-Cai

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 90 (2001), S. 5884-5888

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: Using the hydrodynamic model, we have derived a self-consistent model describing the dynamics of a collisional rf sheath driven by a sinusoidal current source. Numerical results have been obtained for the dependence of ion density, ion kinetic energy, sheath thickness, and sheath electric field, on the collision parameter and the current source parameter. © 2001 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1419267

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