ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
Nanotechnology is occurring simultaneously in almost every field with stronginterdisciplinary applications which have unique and important characteristics for potential noveland high performance devices. Quantum dots grown by epitaxial self-assembly via Stranski-Krastanov growth mode have many favorable properties for infrared sensing. Because of their verysmall size and three-dimensional confinement, the electronic energy levels are quantized anddiscrete. These quantum effects lead to a unique property, “phonon bottleneck”, which might enablethe high operating temperature of infrared sensing which usually requires cryogenic cooling. Herewe report a focal plane array (FPA) based on an epitaxial self-assembled quantum dot infrareddetector (QDIP). The device structure containing self-assembled In0.68Ga0.32As quantum dots with adensity around 3×1010 cm-2 was grown by low-pressure metalorganic chemical vapor deposition(LP-MOCVD). Using different structures, we successfully developed QDIPs with a peakphotoresponse around 5 μm and 9 μm. High peak detectivities were achieved at 77 K from bothQDIPs. By stacking both device structures, we demonstrated a two-color QDIP whose peakdetection wavelength could be tuned from 5 μm to 9 μm by changing the bias. 256×256 detectorarrays based on 5 μm and 9 μm-QDIPs were fabricated with standard photolithography, dry etchingand hybridization to a read-out integrated circuit (ROIC). We demonstrated thermal imaging fromour FPAs based on QDIPs
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.51.201.pdf
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