ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In this paper the multifariousness of SiC/Si heterostructures for device and sensor applicationswill be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) withdifferent geometries actuated by the magnetomotive effect operating under ambient conditions werefabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonatorsare the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices inthe form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra areprocessed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliterdroplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures aredemonstrated
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/13/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.527-529.1111.pdf
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