ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The ability of the VG 9000 glow discharge mass spectrometer to perform highly quantitative materials analysis has led to applications of the instrument in the field of depth profiling. The result has been the emergence of a technique that is capable of performing rapid quantitative depth analysis for a wide range of elements to sub ppm detection limits. Preliminary investigations into depth resolution suggest the capability of resolving nanometre scale structures.Quantitation is achieved by direct ratioing of ion beams to that of the matrix: elemental sensitivity factors, determined from standards, vary by less than an order of magnitude across the periodic table, and are relatively matrix independent, so that high accuracy results may be attained without the need for closely matching standards and matrix. A high resolution double-focusing mass spectrometer affords clear separation of atomic peaks from the majority of the inevitable low level molecular species in the mass spectrum, which would otherwise limit the accuracy of trace element determinations.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740110105
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