ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper introduces a technique for fabricating nano-structures throughsuper plastic nano-forging of metallic glass using nano-scale dies that are fabricatedby a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon andZr-based metallic glass have been studied and are useful for fabricating nano-scaledies because of the isotropic homogeneity of their amorphous structures. We used thedies to nano-forge Pt48.75Pd9.75Cu19.5P22 metallic glass. The thin foil specimens wereheated in a small furnace and compressively loaded in a small vacuum chamber. Dies,a die-forged 1μm-diameter micro-gear, and both 800 and 400nm periodicnano-structures for optical applications were demonstrated. We observed the effectsof thermal expansion and contact angle between the working material and the diematerials on nano-formability. Metallic glasses are highly useful as materials fornano-imprinting and as die materials for FIB nano-machining
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.539-543.2088.pdf
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