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  • 1
    Digitale Medien
    Digitale Medien
    Detection of particles in rf silane plasmas using photoemission method (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 3202-3207 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Nucleation and subsequent initial growth processes of particles in rf silane plasmas are investigated using a newly developed photoemission method. In this method, electrons produced due to interactions of particles with photons (photodetachment, photoionization) are measured. Since threshold energies for the interactions are dependent on particle size, size ranges of the detected particles are determined by wavelengths of the irradiated light. Using this method, small particles such as SinHx (n(approximately-less-than)10), SinHx (n(approximately-less-than)200) and SinHx (n(approximately-greater-than)20) can be detected. The experiments show that even in a very early phase of their growth, particles nucleate and grow principally around the plasma/sheath boundary near the rf electrode, where short lifetime radicals are produced actively. This suggests that the short lifetime radicals are the key species contributing to the particle nucleation and its subsequent initial growth processes. Moreover, it is found that small particles exist even in the bulk plasma. Since some of them are considered to be neutral, they are likely to be transported to the substrate on the grounded electrode. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.363273
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  • 2
    Digitale Medien
    Digitale Medien
    Simultaneous in situ measurements of properties of particulates in rf silane plasmas using a polarization-sensitive laser-light-scattering method (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 104-109 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: A polarization-sensitive laser-light-scattering method is developed for simultaneous in situ measurements of properties (size, size dispersion, density, and refractive index) of particulates formed in processing plasmas. The developed system is applied to observe the growth processes of particulates in a range of their size larger than about 10 nm in rf silane plasmas. A size, a size dispersion (logarithm of a standard deviation of size), a density, and a refractive index of particulates in the plasmas are found to be 10–200 nm, about 0.1, 107–109 cm−3 and about 3–5i, respectively. The former three of such values agree fairly well with ones deduced from scanning electron microscopic (SEM) observation. These particulates grow through three phases of nucleation and initial growth, rapid growth, and growth saturation. Coexistence of two size groups of particulates with narrow size dispersions during and after the rapid growth phase verified by the SEM observation may be explained by a model taking into account coagulation between oppositely charged particulates. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.360916
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  • 3
    Digitale Medien
    Digitale Medien
    Growth of particles in cluster-size range in low pressure and low power SiH4 rf discharges (1999)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 86 (1999), S. 3543-3549 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Growth processes of particles in a cluster-size range below a few nm in size in low pressure and low power SiH4 rf discharges are studied using the new method, in which the threshold photoemission method is coupled with the microwave interferometry, for measurements of their size and density. The density of particles is above 1010 cm−3 and much exceeds that of positive ions, the result of which shows that most of them are neutral. The particles grow mainly around the plasma/sheath boundary near the powered electrode and their size growth rate is 3.4–4.4 nm/s, being much higher than a film growth rate of 0.064–0.12 nm/s. These features strongly indicate that their growth is due to deposition of polymerized species, originated from short lifetime SiH2 radicals, on them, while coagulation between particles becomes appreciable after a time when their density reaches about 1011 cm−3. Moreover, the pulse modulation of rf discharge is found to be effective in reducing the density of cluster-size particles. The reduction can be explained by a model taking account of diffusion of the polymerized species through the radical production region, where the particles nucleate and grow. © 1999 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.371256
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  • 4
    Digitale Medien
    Digitale Medien
    Study on growth processes of particles in germane radio frequency discharges using laser light scattering and scanning electron microscopic methods (1998)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 5665-5669 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Growth processes of particles formed in germane (GeH4) rf parallel plate discharges are studied using a laser light scattering and scanning electron microscopic methods. For GeH4(5%)+He, 30 sccm, 80 Pa, and a relatively high power of 40 W(0.51 W/cm2), particles begin to be observed from a very early time of about 0.13 s after the discharge initiation around the plasma/sheath boundary near the powered electrode, where emission intensity of Ge atoms is high. This appearance time of particles is extremely early compared to that (about 0.5 s) in silane (SiH4) rf discharges. The localized existence of particles suggests that short-lifetime radicals being generated at a high rate may contribute to the particle nucleation, while little information about reaction rates for GeHx (x=0−3) radicals is available. After nucleation and subsequent initial growth of particles, they coagulate quickly with one another, which brings about a growth rate considerably high compared to that for SiH4. Some Ge particles become submicron in size at an early time of 0.3 s and fall to the plasma/sheath boundary near the lower grounded electrode. For such a high coagulation rate (growth rate is about 800 nm/s), particles have irregular nonspherical shapes and most of them are agglomerates composed of chains, while they are almost spherical with a roughness of primary particle size (about 10 nm) for a low coagulation rate (growth rate is about 100 nm/s). Fast appearance of particles for GeH4 discharges also brings about rapid decrease in discharge voltage and absolute value of self-bias voltage. © 1998 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.367420
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  • 5
    Digitale Medien
    Digitale Medien
    In situ observation of nucleation and subsequent growth of clusters in silane radio frequency discharges (2000)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 77 (2000), S. 196-198 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Growth processes of clusters in low-pressure and low-power silane radio frequency discharges are studied by using the newly developed double-pulse-discharge method which realizes in situ measurement of their size and density in a size range of 0.5–4 nm. The clusters begin to be composed of two size groups at about 10 ms after the discharge initiation: clusters in the small size group have an almost constant average size of about 0.5 nm through the discharge period, while those in the large one grow at about 4 nm/s in a monodisperse way. Time evolution of the measured average sizes and densities in the groups is transformed into that of size distributions assuming that the density of SinHx clusters for the small group decreases exponentially with the increase in the number of Si atoms, n, of them, and the size distribution for the large group is the lognormal one. The results show that a critical cluster size for nucleation is SinHx (n∼4). © 2000 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.126922
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  • 6
    Digitale Medien
    Digitale Medien
    Potential structure in silane radio-frequency discharge containing particles (1993)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 63 (1993), S. 1748-1750 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Potential structures are clarified experimentally with an emissive probe in silane-helium radio-frequency (rf) discharges containing particles. The results reveal, compared with a pure helium rf discharge, that both the crest and trough instantaneous plasma potentials in an rf oscillation shift toward the negative side, especially in the particle localized region near the plasma-sheath boundary. The absolute value of the self-bias potential of the powered electrode is reduced. A considerable electric field exists even in the bulk plasma region and the strength increases with the concentration ratio of silane to helium.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.110702
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