ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Layers of ZnO micro-nano structures were deposited on quartz substrates andsubsequently plasma treated in O2 and N2. It was found that exposure to O2 plasma enhanced gasresponse to ethanol vapor of the ZnO layers by a factor 8, while exposure to N2 plasma deterioratedthe gas response. This enhancement of the gas response upon O2 plasma treatment was attributed tothe formation of nanocrystallites of ZnO on the original ZnO micro-nano structures which form thegas sensing layers. The surface chemical state of the original sample was found to be not affected bythe O2 plasma while it was modified by the N2 treatment
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/40/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.47-50.634.pdf
Permalink