Electronic Resource
Amsterdam
:
Elsevier
Microelectronic Engineering
14 (1991), S. 249-258
ISSN:
0167-9317
Keywords:
Monte Carlo
;
Pattern profile abnormality
;
SAL601
;
SOG (spin-on glass)
;
catalyst
;
chemical amplification resist
;
diffusion
;
humidity
;
pattern profile simulation
;
ray-tracing model
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(91)90010-B
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