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  • 1
    Electronic Resource
    Electronic Resource
    Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 339 (May 2007), p. 263-268 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: This paper deals with a novel polishing technology using polymer particles. It has beenproposed and developed by the authors for the purpose of solving the problems associated withpolishing pads such as pad deterioration, process inconsistency and poor accuracy. Single sidepolishing of silicon wafers and double side polishing of quartz crystal square wafers wereperformed to clarify the basic characteristics of the technology. The results showed that appropriatecombination of tool plate with polymer particles could greatly improve polishing characteristics.In particular, the edge profiles can be controlled to have desirable shape as well as amplitudes
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/53/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.339.263.pdf
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Investigation on 4-Body Finishing Technology with Polishing Paste (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 329 (Jan. 2007), p. 267-272 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: A new concept of finishing technology, Multi-Body Finishing (MBF), is proposed tobroaden the concept of Polymer Particles Assisted Polishing (POPAP, named also as 4-bodyfinishing). In this paper, a new 4-body finishing technology is developed, in which paste dispersionmedium is used and fine polymer particles are introduced as the 4th body to extinguish the microscratchesand improve the dispersion stability of the polishing paste. It is verified that both highremoval rate and high dispersion stability, compared to the conventional paste, can be obtained byusing the new paste in which the low viscosity base agent is used and the media particlesconsiderably finer than the abrasives are added
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.329.267.pdf
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
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