ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
It is shown that by multipulse TEA-CO2 laser irradiation of some insulator ceramic samples (TiO2, ZrO2, HfO2) in an ammonia atmosphere, surface layers are synthesized exhibiting a complicated morphology and having a complex structure containing, beside metallic nitrides, nonstoichiometric oxygen-depleted oxides, oxinitrides, etc. Such layers have a diminished sheet resistance, and display good conduction characteristics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.344080
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