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  • 1
    Digitale Medien
    Digitale Medien
    s.l. : American Chemical Society
    The @journal of physical chemistry 〈Washington, DC〉 94 (1990), S. 2219-2221 
    Quelle: ACS Legacy Archives
    Thema: Chemie und Pharmazie , Physik
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    s.l. : American Chemical Society
    The @journal of physical chemistry 〈Washington, DC〉 94 (1990), S. 8381-8384 
    Quelle: ACS Legacy Archives
    Thema: Chemie und Pharmazie , Physik
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 3
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 2301-2320 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: 100-nm-thick TiW (30 at. % Ti) films were used as diffusion barriers between silicon substrates and thin Cu films. Sheet resistance measurements, Rutherford backscattering spectrometry, Auger electron spectroscopy, transmission electron microscopy, scanning electron microscopy, and x-ray diffractometry indicated the absence of interdiffusion and structural change for unpatterned Si/TiW/Cu samples up to 775 °C if there was no exposure to air between TiW and Cu deposition and 850 °C if there was an exposure, respectively. Leakage current measurements showed no deterioration of diode junctions up to 725 °C for TiW without air exposure and 775 °C for air-exposed TiW.
    Materialart: Digitale Medien
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  • 4
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5176-5187 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The properties of 100-nm-thick Ti55N45 and Ti45N55 films as diffusion barriers between silicon substrates and thin Cu films were studied by sheet resistance measurements, Rutherford backscattering spectrometry, Auger electron spectroscopy, secondary-ion mass spectrometry, transmission electron microscopy, scanning electron microscopy, energy dispersive x-ray spectroscopy, x-ray diffractometry, and diode leakage current measurements. For unpatterned Si/titanium nitride/Cu samples, all the layers were intact and there was no indication of interdiffusion by conventional depth profiling techniques up to 700 °C for Ti55N45 and 900 °C for Ti45N55 after 30 s rapid thermal anneal in N2, respectively. Leakage current measurements did not show deterioration of diode junction (with junction depth of 0.25 and 0.30 μm) up to 650 °C for Ti55N45 and 800 °C for Ti45N55. The improvement in failure temperature of the N-rich Ti45N55 diffusion barrier is a result of the lower defect density and a more stable feature furnished by nitrogen stuffed at the defects.
    Materialart: Digitale Medien
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  • 5
    Digitale Medien
    Digitale Medien
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 90 (1989), S. 597-598 
    ISSN: 1089-7690
    Quelle: AIP Digital Archive
    Thema: Physik , Chemie und Pharmazie
    Notizen: We consider the generalized Smoluchowski equation for the orientational distribution of interacting hard rod-like particles. Using the Onsager theory of excluded volume in these systems, we solve for steady-state solutions to this equation in the special case of elongational flow. Accordingly, we obtain explicit predictions concerning the effect of such flow on the suppression of orientional ordering phase transitions and on the nonlinear behavior (dependence on velocity gradient) of the viscosity.
    Materialart: Digitale Medien
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  • 6
    Digitale Medien
    Digitale Medien
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 92 (1990), S. 7618-7624 
    ISSN: 1089-7690
    Quelle: AIP Digital Archive
    Thema: Physik , Chemie und Pharmazie
    Notizen: By calculating radii of gyration of a Gaussian polymer chain in simple shear flow, we study the deformed shape of an isolated macromolecule. To order ε≡4-d (d=spatial dimensionality) and to the lowest nontrivial order in the shear rate, we consider the effect of hydrodynamic interactions on the flow induced anisotropy of the radii of gyration with respect to directions specified by the flow. We predict no change in projections of polymer shape along directions perpendicular to the flow direction, in agreement with experiment. Our results also explain the negative sign and the smallness of the second normal stress.
    Materialart: Digitale Medien
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  • 7
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 2446-2457 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The thermal stability of an α-Ti film in contact with a δ-TiN film in the structure of a TiN/Ti/TiN film stack on SiO2 substrates was studied by in situ sheet resistance (Rs) measurement, Auger electron spectroscopy, glancing angle x-ray diffractometry, cross-sectional transmission electron microscopy, scanning electron microscopy, and atomic force microscopy. It was found that nitrogen dissolves from TiN into Ti between 405 and 474 °C and a significant reaction between Ti and TiN results in the formation of ε-Ti2N in the temperature range of 505–548 °C. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
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  • 8
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 77 (1995), S. 5751-5762 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The interfacial reactions in the structures of Si/SiO2 (500 nm)/Ru (65 nm) (up to 950 °C) and Si/SiO2 (500 nm)/Ru (72 nm)/Al-0.8 wt % Si (630 nm) (up to 700 °C), were studied by Rutherford backscattering spectrometry, Auger electron spectroscopy, x-ray diffractometry, selected-area electron diffraction, energy-dispersive x-ray spectroscopy, scanning electron microscopy, and transmission electron microscopy. A thin film of Ru was stable on a SiO2 substrate up to 30 min in a vacuum anneal at 950 °C. In vacuum, a fast interfacial reaction between the Ru thin film and the Al-Si overlayer started between 550 and 575 °C, resulting in the formation of a Si/SiO2/ RuAl2/(Ru4Al13)Al-Si layer sequence. Similar to the reactions between Pt group metals and Al, the Ru/Al reaction is nonuniform. It is controlled by a nucleation mechanism and is accompanied by void formation. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
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  • 9
    Digitale Medien
    Digitale Medien
    s.l. : American Chemical Society
    Macromolecules 20 (1987), S. 543-551 
    ISSN: 1520-5835
    Quelle: ACS Legacy Archives
    Thema: Chemie und Pharmazie , Physik
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 10
    Digitale Medien
    Digitale Medien
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 88 (1988), S. 3944-3954 
    ISSN: 1089-7690
    Quelle: AIP Digital Archive
    Thema: Physik , Chemie und Pharmazie
    Notizen: A systematic approach is developed for describing the hydrodynamics of flowing polymer solutions by using a microscopic Langevin model for which the inertial nonlinearities and solvent advection are ignored. The influence of polymer motion on the solution velocity field is evaluated by averaging over the polymer degrees of freedom at a time in the distant past in order to derive an effective hydrodynamic equation of motion for the averaged polymer solution. The polymer's contribution to the fluid stress tensor is computed from the total solution stress tensor whose divergence appears in the averaged effective hydrodynamic equation. Introduction of the Rouse chain and long wavelength limits enables the analytical evaluation of this stress tensor for any time-dependent linear flows. All the material functions for the polymer solution are evaluated in a simplified fashion for these flows, recovering some known results and deriving several new ones.
    Materialart: Digitale Medien
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