ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We have constructed a scanning tunneling microscope for operation under UHV conditions (10−8 Pa). With this instrument topographic measurements can be made on metal and semiconductor surfaces by means of a scanning tip electrode, driven by piezoelectric ceramic elements. The maximum area covered ranges up to 4000×4000 A(ring)2 with a resolution better than 10 A(ring) laterally and 0.15 A(ring) rms perpendicular to the plane. Because of its compact design, the scan unit is very insensitive to vibrations and has a response time down to 0.3 ms. This allows a high scan rate to be used. In order to minimize temperature effects, special attention is paid to the geometry of the construction and the materials used, resulting in a drift ≤4 A(ring)/min along the surface and 0.5 A(ring)/min perpendicular.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1138155
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