ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In examining particulate deposits in the pipes within a chemical vapor deposition (CVD)system, vibration diagnostics is compared and studied against ultrasonic diagnostics. The lattermethod involves pulsing the outer wall of pipes with an ultrasonic sensor and analyzing theresulting echo to observe particulate deposits inside pipes. Vibration diagnostics examines theexistence of particulate deposits by analyzing the difference in the frequencies generated when avibrator is adhered to the outer wall of pipes. With ultrasonic diagnostics, good test results wereobtained only when particulate deposits were attached to the inner wall of the pipes. After sometime, however, particulate deposits were not detected properly, as the ultrasonic wave failed to crossthe fine gaps created between the inner wall of the pipe and the deposits. In conclusion, thevibration diagnostics is being expected as the effective method in monitoring the particulatedeposits inside pipes in the CVD system where the desired behavior is reduced frequency alongwith the the particulate deposits in comparison to the case where the pipe is clean
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.321-323.1636.pdf
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