ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract TiC x N y mono- and TiCx-TiN double-layer films with a thickness of 30 to 100 μm were prepared on a carbon steel (C: 0.6 to 0.7%) substrate by CVD in an ultrasonic field (ultrasound frequency: 19kHz; power: 10 to 20Wcm−2). The moderate deposition conditions for obtaining an adherent and thick film of TiC x N y were: substrate temperature: 1050° C; H2, N2, TiCl4 and CH4 flow rates: 6.2, 4.0, 0.9 and 0.26 to 2.0 ml sec−1, respectively. The growth rate, grain size and degree of 〈2 2 0〉 preferred orientation were found to decrease with increase in CH4 concentration. TiC x N y film on carbon steel had a Vickers microhardness of 1800 to 2600 and an adhesion strength to the substrate of more than 120 kg cm−2. A TiC x -TiN (x∼0.5) double-layer film was obtained at 1050° C by a controlled alternative deposition of TiC x or TiN. Quasiepitaxial growth of crystallites in the double layers was found to prevail in both coatings of TiC x (220)/TiN (220)/steel and TiN (200)/TiCx (200)/steel.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00549299
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