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  • 1995-1999  (5)
  • 1925-1929
  • 1999  (5)
  • 1
    Electronic Resource
    Electronic Resource
    X-ray diffraction pole figure evidence for (111) sidewall texture of electroplated Cu in submicron damascene trenches (1999)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 74 (1999), S. 682-684 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The crystallographic texture of electroplated Cu in damascene trenches has been examined by x-ray diffraction pole figure analysis. The influence of two post-plating treatments on the resulting orientation of (111) planes of the Cu inside the trenches are compared. When the as-deposited small-grained Cu is allowed to recrystallize at room temperature before chemical mechanical polishing of the overlying Cu, we observe only a (111) fiber texture of the Cu inside the trenches. In contrast, when the overlying material is polished away before recrystallization of the small-grained Cu, pole figures show evidence of sidewall texture of the (111) planes in addition to the (111) fiber texture in the as-deposited as well as the annealed state. The presence or absence of a sidewall texture component in the pole figures offers insight into the evolution of the microstructure of damascene Cu. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.122986
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Spinales Kompressionssyndrom (1999)
    Springer
    Der Onkologe 5 (1999), S. 1054-1061 
    Details
    ISSN: 1433-0415
    Source: Springer Online Journal Archives 1860-2000
    Topics: Medicine
    Notes: Die Kompression des Rückenmarkes oder der Cauda equina ist eine gefürchtete Komplikation bei Krebspatienten. Sie läßt sich autoptisch bei etwa 5% aller Tumorpatienten nachweisen und ist aufgrund ihrer klinischen Problematik wie Parese der unteren Extremitäten oder Verlust der Blasen- und Mastdarmkontrolle ein akut zu behandelnder onkologischer Notfall.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s007610050474
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    A Complete Frequency-Field Chart for the Antiferromagnetic Resonance in MnF2 (1999)
    Springer
    International journal of infrared and millimeter waves 20 (1999), S. 617-622 
    Details
    ISSN: 1572-9559
    Keywords: antiferromagnetic resonance ; MnF2 ; millimeter ; submillimeter ; vector network analyzer ; superconducting magnet
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract Antiferromagnetic resonance (AFMR) measurements on a well characterized single crystal sample of MnF2 have been performed using various kinds of millimeter and submillimeter sources up to 570 GHz and a superconducting magnet up to 20 T. All the AFMR modes predicted from the theory have been observed. We report a complete frequency-field chart for these AFMR modes.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1023/A:1022692506405
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    Laser-induced molecular beam epitaxy of group-III nitrides (1999)
    Springer
    Applied physics 69 (1999), S. S799 
    Details
    ISSN: 1432-0630
    Keywords: PACS: 68.55; 77.84.B; 79.20.D; 81.15.F
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract. nitrides by laser-induced molecular beam epitaxy (LIMBE). The requirements for the formation of high-quality, monocrystalline layers are much stronger than those for polycrystalline films. We have modified and improved the conventional pulsed laser deposition. In our process, we use metallic targets in a nitrogen environment instead of ceramic or pressed powder nitrides and we employ picosecond laser pulses with high energy (〉1 mJ) and high repetition rate (2 kHz). We have grown GaN, AlN, InN, InGaN and Mg-doped GaN on sapphire (0001).
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s003390051533
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    In situ and Real-Time Monitoring of Plasma-Induced Etching of PET and Acrylic Films (1999)
    Springer
    Plasmas and polymers 4 (1999), S. 247-258 
    Details
    ISSN: 1572-8978
    Keywords: Plasma ; polymer etching ; in situ detection ; PET and acrylic coating
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract Residual gas analysis (RGA) and optical emission spectroscopy have been evaluated as potential in situ techniques for the detection of plasma-induced polymer surface etching. The detection is based on the measurement of CO and CO2 species formed in the gas phase following oxidation of the etching fragments released from the polymer surface. Experiments were performed on poly(ethylene terephthalate) and UV-cured acrylic (tripropylene glycol diacrylate) films exposed to O2 RF (13.56 MHz) plasmas. A linear correlation is obtained between the formation of CO and the polymer etching rate over the entire experimental range, but discrepancies appear for the formation of CO2 at high treatment powers (etching rate 〉 1.0 μg/min.cm2). This behavior is attributed to a deficit of oxidizing agents relative to the generation of etching fragments. The results suggest that both RGA and optical emission spectroscopy can be used to monitor in situ and in real-time the etching of polymer surfaces during plasma treatment.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1023/A:1021875310148
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    Paper (German National Licenses)
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