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On the mechanism of aluminum via fill by reflow and forcefill as studied by transmission electron microscopy (1999)

Dirks, A. G. ; Webster, M. N. ; Turner, P. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 85 (1999), S. 571-577

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: A comparison has been made between the Al via fill mechanisms in both reflow and forcefill processes. Cross-sectional transmission electron microscopy has been used to study the Al transport into the vias as a function of time. Our analysis shows that reflow and forcefill results can be explained by a stress relaxation model. We propose that the transport of aluminum into the vias as a function of time is described by both diffusion and dislocation movement. In the case of reflow at high temperature, the vias may be filled completely, after closure, by high-temperature creep of Al. In the case of forcefill, an additional high stress has been applied which raises the strain levels such to activate the dislocation glide and climb mechanism. The results from detailed investigations of the microstructure by cross-sectional transmission electron microscopy support these new insights. © 1999 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.369491

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MRT-gesteuerte regionale Tiefenhyperthermie (1999)

Peller, M. ; Löffler, R. ; Baur, A. ; [et al.]

Springer

Der Radiologe 39 (1999), S. 756-763

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ISSN: 1432-2102

Keywords: Schlüsselwörter MRT-Bildgebung ; Regionale Tiefenhyperthermie ; Weichteiltumoren ; Knochentumoren ; Key words MRI ; Regional hyperthermia ; Soft-tissue tumors ; Bone tumors

Source: Springer Online Journal Archives 1860-2000

Topics: Medicine

Description / Table of Contents: Summary Purpose: Regional hyperthermia in combination with chemotherapy or/and radiotherapy is a promising treatment concept for locally advanced, deep-seated tumors. The purpose of the project is the optimization of the therapy using non-invasive, three-dimensional imaging of tissue changes or of the temperature distribution during regional hyperthermia. Methods: MRI offers methods suitable in principle for tissue characterization and MR thermometry. A new MRI-hyperthermia hybrid system has been developed based on an innovative hyperthermia applicator and an open MRI system. Results: After successful testing of the new MRI-hyperthermia hybrid system simultaneous MRI and regional hyperthermia in patients could be accomplished for the first time. At present the T1 relaxation time seems to be a promising parameter for MR thermometry. Conclusion: The first clinical application of the MRI-hyperthermia hybrid system can be regarded as an important step towards the development of regional hyperthermia. This new hybrid system and the MR thermometry methods have to be investigated prospectively in clinical studies.

Notes: Zusammenfassung Fragestellung: Die regionale Tiefenhyperthermie in Kombination mit Chemotherapie und/oder Radiotherapie ist ein vielversprechendes Behandlungskonzept für lokal fortgeschrittene, tiefliegende Tumoren. Ziel dieses Projektes ist die nichtinvasive, dreidimensionale Darstellung der Gewebsveränderungen und der Temperaturverteilungen während der regionalen Tiefenhyperthermie. Methodik: Die Magnetresonanztomographie bietet prinzipiell geeignete Methoden für die Gewebecharakterisierung und für die MR-Thermometrie. Auf der Basis eines innovativen Hyperthermieapplikators und eines offenen MR-Tomographen wurde ein neues MRT-Hyperthermie-Hybridsystem entwickelt und erprobt. Ergebnisse: Nach der erfolgreichen Erprobung des neuen MRT-Hyperthermie-Hybridsystems an Phantomen und Probanden konnte erstmals am Patienten eine simultane MR-Bildgebung und Tiefenhyperthermie durchgeführt werden. Die T1-Relaxationszeit erscheint nach unseren derzeitigen Forschungsergebnissen ein vielversprechender Ansatz für die MR-Thermometrie bei 0,2 T zu sein. Schlußfolgerung: Der erstmalige klinische Einsatz des MRT-Hyperthermie-Hybridsystems kann als wichtiger Meilenstein für die Gesamtentwicklung der regionalen Tiefenhyperthermie bezeichnet werden. Das neue Gerät und die unterschiedlichen MRT-Verfahren, insbesondere die der MR-Thermometrie, müssen nun in klinischen Studien untersucht werden.