ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Electron beam induced-deposition (EBID) is a promising technique for fabricatingnanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is nowreaching down to subnanometers. However, the deposits obtained by EBID contain a large amount ofcarbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such asnanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques toreduce carbon were applied, including post-deposition heat-treatments and the modification ofprecursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe2O3,and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the ironpentacarbonyl precursor
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/17/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.561-565.1101.pdf
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