ISSN:
1662-9779
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Physik
Notizen:
In the development of our Z-pinch plasma EUV source, xenon (Xe) is used for thebackground gas discharges, and a solid tin (Sn) rod is used as target material due to its potential ofhigh convention efficiency (CE) from input electric energy to EUV radiation [1, 2]. The Z-pinchplasma was driven by pulsed current with amplitude of 30 kA and pulse duration of 110 ns. Pinholeimaging, EUV spectrograph and in-band EUV energy monitor were used to characterize the EUVemission from the Z-pinch discharge. The experimental analyses have demonstrated the CE was ashigh as 3% [3]
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.121-123.885.pdf
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