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  • 1995-1999  (2)
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  • 1
    Digitale Medien
    Digitale Medien
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 1471-1473 
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The plasma induced charging of surfaces in a plasma during semiconductor processing has been measured noninvasively using microelectromechanical devices. We have designed, modeled, and fabricated microcantilevers to act as charge sensing probes. The devices exhibit a mechanical deformation when charged, which is probed in situ by optical techniques, or measured by optical inspection after removal from plasma. Charging voltage measurements in a parallel-plate reactive-ion-etching reactor show that more charging is evident at the electrode edge, and that the charging is a strong function of input rf power, chamber pressure, and flow rate of gases. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    ISSN: 0001-1541
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Werkstoffwissenschaften, Fertigungsverfahren, Fertigung
    Notizen: Silicon-based microfabrication of a novel chemical reactor (microreactor) having submillimeter flow channels with integrated heaters, and flow and temperature sensors is described. The potential application of this reactor to partial-oxidation reactions is explored by using Pt-catalyzed NH3 oxidation as a model reaction. Investigation of reactor behavior as a function of operating conditions shows that conversion and selectivity behavior of conventional laboratory reactors can be reproduced and demonstrates the feasibility of conducting chemical reactions in microfabricated systems. Ignition-extinction behavior is explored, along with high-temperature microreactor materials degradation. Potential applications and scale-up of microreactors are also discussed.
    Zusätzliches Material: 15 Ill.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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