ISSN:
1618-2650
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Summary For trace and ultratrace analysis a lot of analytical methods are available, most of them for elemental analyses. Goods acceptance tests and process control in the industries use elemental analyses to a large extent, too. By examples from semiconductor technology we demonstrate that pure elemental analysis is no longer sufficient in complex production sequences. Our examples include ion chromatographic and infrared spectroscopic investigations into silicon nitride passivation layers and boron-phosphorus-silicon-glasses, in which the analysis has to distinguish between “active” (detrimental) and “neutral” modifications of the same element, which is a special kind of “speciation analysis”. Furthermore we describe a sophisticated way of process control by “simulation analysis” (SA). By SA single production steps or whole process sequences are carefully simulated in the analytical lab. For the screening of metal impurities in cleaning solutions for semiconductors e.g. we show that SA can clearly identify the crucial species, while at the same time costs and time are saved for actual analyses and future developments as well.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00633567
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