ISSN:
1434-6079
Schlagwort(e):
81.35.+k
;
61.16.Di
;
81.15.Ef
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Physik
Notizen:
Abstract Effects of low-energy cluster beam deposition (LECBD) on the growth of thin films are presented. According to TEM results, LECBD antimony films are the result of random packing of the incident clusters. We show that the “pavement of the surface substrate” previously observed in the first stage of film growth is still a valid model for thick films. With low compactness and the high roughness which characterize LECBD films, specific applications are suggested.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF01425680
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