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  • 1
    Electronic Resource
    Electronic Resource
    Role of deposition conditions, impurities and structural defects in the epitaxial growth of thin films (1981)
    Springer
    Applied physics 24 (1981), S. 85-88 
    Details
    ISSN: 1432-0630
    Keywords: 68.50 ; 61.70
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A summary of the theoretical and experimental investigations carried out to understand the problem of epitaxy is given. The effect of deposition conditions and the nature of the substrate-deposit combination on the orientation of the final film is discussed. The importance of the nucleation and growth stages, reorientation and recrystallization effects and the influence of the impurities and defects in the substrate surface on the quality of the films deposited are presented.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00900403
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