ISSN:
1432-0630
Schlagwort(e):
68.50
;
61.70
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract A summary of the theoretical and experimental investigations carried out to understand the problem of epitaxy is given. The effect of deposition conditions and the nature of the substrate-deposit combination on the orientation of the final film is discussed. The importance of the nucleation and growth stages, reorientation and recrystallization effects and the influence of the impurities and defects in the substrate surface on the quality of the films deposited are presented.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00900403
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