ISSN:
0142-2421
Keywords:
SIMS
;
topography
;
AFM
;
imaging
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
In order to provide an accurate rendition of a three-dimensional (3D) volume obtained by SIMS, it is necessary to take account of the topography of the original surface and the relative sputter rates of the different structures within the volume. We describe a method that corrects both distortions to 3D SIMS images. An atomic force microscope is used to produce a topographic images of the area analysed by SIMS, both before and after the depth profile. This information is convoluted with the 3D SIMS image to produce a correct 3D image of the changes in composition within the volume of the material. © 1997 by John Wiley & Sons, Ltd.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
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