ISSN:
0142-2421
Schlagwort(e):
Chemistry
;
Polymer and Materials Science
Quelle:
Wiley InterScience Backfile Collection 1832-2000
Thema:
Physik
Notizen:
Si+ bombardment of Sb/n-Si Schottky contacts significantly affects the values of some Schottky parameters even at low does densities. The parameters considered are the ideality constant n, the saturation current density Is and the series resistance R. Before implantation these parameters exhibited large variations due to interface conditions. After implantation more uniform I-V characteristics were observed. Implantation led to higher values for the ideality constant and the series resistance and lower values for the saturation current. The ideality factor showed a decrease with increasing implantation dose. The saturation current and series resistance did not show any dose dependence. The compositional/structural properties of the contacts after ion bombardment are altered at high dose densities. For dose densities φ ≥ 5 × 1014 Si+ cm-2, α-particle channelling showed the silicon substrate to be partly amorphized. This amorphization increased with increasing dose densities. AES and RBS measurements found no evidence of silicide formation. Only slight mixing was observed. Other experimental and theoretical studies either confirm our measurements or confirm the trend of our measurements.
Zusätzliches Material:
4 Ill.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1002/sia.740190164
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