ZIB

Treffer pro Seite

Treffer 1 - 1 | 1 Treffer

Sortierung

Digitale Medien

A molded deep-UV portable conformable masking system (1986)

Lin, B. J. ; Chao, V. W. ; Petrillo, K. E. ; [weitere]

Stamford, Conn. [u.a.] : Wiley-Blackwell

Polymer Engineering and Science 26 (1986), S. 1112-1115

zur Merkliste hinzufügen auf der Merkliste

Details

ISSN: 0032-3888

Schlagwort(e): Chemistry ; Chemical Engineering

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Chemie und Pharmazie , Maschinenbau , Physik

Notizen: A second-generation capped deep-UV portable conformable masking system Is described. Two major improvements of this system are; (1) The replacement of the PMMA bottom layer with the PMMA-MA-MAN terpolymer which has a higher thermal stability and a higher deep-UV sensitivity. (2) The application of the mold hardening process to eliminate the “wings” protruding from the novolac-terpolymer interface, to facilitate a better choice of developers for the bottom layer, and to provide a better refractive index match between the novolac image lines.

Zusätzliches Material: 5 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/pen.760261607

Permalink

Bibliothek	Standort	Signatur	Band/Heft/Jahr	Verfügbarkeit

Andere fanden auch interessant ...

Artikel (Nationallizenzen)

Volltext

Treffer 1 - 1 | 1 Treffer