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Surface adhesion reduction in silicon microstructures using femtosecond laser pulses (1996)

Tien, N. C. ; Jeong, S. ; Phinney, L. M. ; [weitere]

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 68 (1996), S. 197-199

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Details

ISSN: 1077-3118

Quelle: AIP Digital Archive

Thema: Physik

Notizen: A reduction of the adhesion between polysilicon surface-micromachined structures and its silicon substrate using ultrashort pulse laser irradiation has been demonstrated. Polysilicon cantilevers, which adhered to the silicon substrate after final rinse and dry, were freed after irradiation by a 800 nm wavelength laser with pulse duration of 150 fs (full width at half-maximum) and fluences up to 40 mJ/cm2. Increasing the pulse widths to 2.7 ps resulted in significantly fewer freed cantilevers indicating that the process depends heavily on the presence of high-temperature carriers in the silicon. Adhesion reduction has been observed from exposure to a single pulse which results in minimal lattice temperature increase. © 1996 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.116458

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Digitale Medien

Periodic viscous flow: A bench-mark problem (1990)

Goldberg, I. S. ; Carey, G. F. ; McLay, R. ; [weitere]

Chichester : Wiley-Blackwell

International Journal for Numerical Methods in Fluids 11 (1990), S. 87-97

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Details

ISSN: 0271-2091

Schlagwort(e): Periodic ; Unsteady ; Viscous flow ; Finite elements ; Engineering ; Engineering General

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Maschinenbau

Notizen: A double-transform technique provides a semi-analytic solution in the form of a series expansion for unsteady axisymmetric Stokes flow in the entrance region of a semi-infinite rigid cylindrical tube. This in turn offers an appropriate bench-mark problem for evaluating the quality of numerical approximations. To illustrate this, periodic axial flow in a circular cylinder is considered. Some aspects of the bench-mark problem that are of interest include the reverse flow in the wall layers, the accuracy of the approximate method in different flow regimes and the mesh grading. This bench-mark problem and the numerical study provide some insight into practical issues pertinent to the approximate solution of unsteady and periodic flows.

Zusätzliches Material: 3 Ill.