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  • 1995-1999  (4)
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  • 1
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 2160-2161 
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: During the first thermal treatment after deposition and/or passivation of Al-based interconnects, a marked decrease in the electrical resistance can be observed. This resistance decrease cannot be described in terms of a single rate constant. Precipitation of the alloyed elements is probably the responsible atomic process. In a previous article, a spectrum of activation energies was extracted in order to characterize this decay. Recent research has shown that the presence of an activation energy spectrum is, mathematically, completely equivalent with a spectrum of pre-exponential factors. Since for precipitation–dissolution, the pre-exponential factor is a function of the distribution and geometry of the precipitates, the use of a spectrum of pre-exponential factors is for this specific case probably physically more relevant. The technique introduced for the determination of the spectrum of activation energies is still valid in case of the presence of a spectrum of pre-exponential factors. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    Springer
    Applied physics 63 (1996), S. 475-480 
    ISSN: 1432-0630
    Schlagwort(e): PACS: 68.65 (or 66)
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: g (t)=g 0 f  -1 (t/t 0), where g(t) is the sub-layer thickness at time t, g 0 and t 0 are parameters which depend on the treated material and plasma characteristics,  f -1 is the inverse of the function −ln(1−x)+x), 0≤x≤1. Under negligible erosion effects, the expression for g(t) reduces to the parabolic law. The diffusion zone (substratum) growth does not follow the parabolic law as well. However, the deviation occurs after long plasma nitriding time. The model can be used for experimentally determining the effective diffusion coefficients and the erosion rate during plasma nitriding of metal surfaces.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
  • 3
    Digitale Medien
    Digitale Medien
    Springer
    Applied physics 63 (1996), S. 475-480 
    ISSN: 1432-0630
    Schlagwort(e): 68.65 (or 66)
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: Abstract A diffusion model of metal surface modification by plasma nitriding has been developed. This model takes into account the erosion effects at the plasma/solid interface occurring due to the ion bombardment of the surface. For constant sputtering rate, which is the usual situation during plasma nitriding, the growth of the sub-layers is well described by the analytical expressiong(t) =g 0,f −1 (t/t 0), whereg(t) is the sub-layer thickness at timet,g 0 andt 0 are parameters which depend on the treated material and plasma characteristics,f −1 is the inverse of the function — In(1 - x) + x), 0 ≤x ≤ 1. Under negligible erosion effects, the expression forg(t) reduces to the parabolic law. The diffusion zone (substratum) growth does not follow the parabolic law as well. However, the deviation occurs after long plasma nitriding time. The model can be used for experimentally determining the effective diffusion coefficients and the erosion rate during plasma nitriding of metal surfaces.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
  • 4
    ISSN: 1432-0630
    Schlagwort(e): PACS: 68.65; 68.66
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Maschinenbau , Physik
    Notizen: 0 f-1(t/t0), where g(t) is the sub-layer thickness at time t, g0 and t0 are parameters that depend on the treated material and plasma characteristics, and f-1 is the inverse function of f(x)=-(ln(1-x)+x), where x=g(t)/g0, 0≤x≤1. Under negligible erosion effects, the model becomes of Wagner’s diffusion model type and the expression for g(t) reduces to the parabolic law. The model can be simplified by considering the compound layer as a united one. The general and simplified models can be used as a method for the experimental determining of the effective diffusion coefficients and the erosion rate during plasma treatment of material surfaces.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
    BibTip Andere fanden auch interessant ...
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