ISSN:
1432-0630
Schlagwort(e):
44.30+v
;
61.80 Jh
;
79.20 Nc
;
96.60 Vg
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract We have investigated the effect of heat loss through evaporation on the surface temperature profile and the evaporation yield of an ion-induced spike. We derive a three-dimensional extension of a nonlinear integral equation first found by Mann and Wolf to describe the temperature profile in a semiinfinite medium in the presence of heat loss through the surface. The equation has been solved by perturbation expansion in powers of the evaporation rate. For heavy-ion induced, cylindrical elastic-collision spikes, noticeable but moderate corrections are found to evaporation yields estimated previously by neglecting heat loss due to evaporation. These results are relevant mainly to sputtering of metals by heavy atomic and molecular ion bombardment. Comments are also made on sputting of insulators both by heavy keV ions and by ionizing particles. Expressions for an effective sputter time and sputter area are derived for cylindrical geometry; both quantities turn out independent of the initial spike temperature. The sputter radius is normally greater than the depth of the crater formed; we conclude that the influence of crater formation on the evaporation yield is normally negligible.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00620295
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