ISSN:
1077-3118
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
We have estimated broadening of sputter profiles for several elements, either buried or implanted in Si, under Ar+, Cs+, and O2+ bombardment using a semiempirical model developed recently by P. C. Zalm and C. J. Vriezema [Nucl. Instrum. Methods B 67, 495 (1992)]. Excellent agreement has been found between this model and experimental data for all three types of primary ions. In the case of oxygen bombardment, however, good agreement is only achieved by taking into account beam-induced changes at the surface, including swelling and the formation of a surface oxide.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.108989
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