ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A simple design for a fully computer-controlled, three-dimensionally movable probe position system is described. Particular attention is given to the constraints of a plasma environment. A novel spring joint eliminates the need for ball bearings, universal joints, telescoping parts, etc., and thus avoids the potential risk of cold welding. The new probe drive is external to the plasma device, user-friendly and robust, and it provides for high spatial resolution. The computer control system is flexible with respect to computing platform and application development environment.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144289
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