Publication Date:
2021-01-08
Description:
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.
Language:
English
Type:
reportzib
,
doc-type:preprint
Format:
application/pdf
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