ISSN:
1573-4803
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
Notizen:
Abstract An implied analytical condition, connecting the incidence angles θ o and θ e between the two intersecting microfacet normals and the ion beam direction, has been inferred for the existence of local quasi-stable intersections (angular points) during ion erosion. This condition, which can also be deduced on the basis of the erosion slowness curve, leads to a higher degree algebraic equation with a parameter, applicable for any dependence S=S (θ), expressed as an algebraic polynomial expression in cos θ. A new graphical method for evaluation of orientations θ e compatible with a given orientation θ o, based on a known polar diagram cursor-type, has also been proposed.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00540728
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