ISSN:
1432-0630
Keywords:
42.30
;
42.80
;
72.40
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract This review paper is concerned with the imaging properties and major uses of scanning optical microscopes. It is shown that the confocal scanning microscope exhibits a form of super-resolution and that the instrument in general has great application in nonlinear microscopy and the inspection of electronic devices.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00885994
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