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Comment on “Evaluation of concentration-depth profiles by sputtering in SIMS and AES” by S. Hofmann (1979)

Shimizu, R.

Springer

Applied physics 18 (1979), S. 425-426

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ISSN: 1432-0630

Schlagwort(e): 79.20

Quelle: Springer Online Journal Archives 1860-2000

Thema: Maschinenbau , Physik

Notizen: Abstract The statistics of the sputtering process, which has been used to explain sputterbroadening effect due to surface roughness, has been treated with conditional probabilities. This results in the relationship, $${{\Delta z} \mathord{\left/ {\vphantom {{\Delta z} z}} \right. \kern-\nulldelimiterspace} z} \propto \sqrt {(1 + \overline \gamma )/z} $$ , instead of $${{\Delta z} \mathord{\left/ {\vphantom {{\Delta z} z}} \right. \kern-\nulldelimiterspace} z} \propto {1 \mathord{\left/ {\vphantom {1 {\sqrt z }}} \right. \kern-\nulldelimiterspace} {\sqrt z }}$$ derived by S. Hofmann [Appl. Phys.9, 59 (1976)], where δz,z, and $$\overline \gamma $$ are the depth resolution, sputtered depth and sputtering yield, respectively.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF00899698

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Digitale Medien

Development of standards for surface analysis by ISO technical committee 201 on surface chemical analysis (1997)

Powell, C. J. ; Shimizu, R.

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 25 (1997), S. 860-868

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ISSN: 0142-2421

Schlagwort(e): ISO/TC 201 on Surface Chemical Analysis ; standards ; surface analysis ; Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: A summary is given of the organization and work of Technical Committee 201 on Surface Chemical Analysis of the International Organization for Standardization (ISO). Twelve potential international standards are currently in various stages of development and a further thirteen standards are expected to be developed shortly. Information is also given on expected future needs for standards with examples from a recent survey of experts in Auger electron spectroscopy and x-ray photoelectron spectroscopy. © 1997 John Wiley & Sons, Ltd.

Zusätzliches Material: 14 Tab.

Materialart: Digitale Medien

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