ISSN:
0049-8246
Keywords:
Chemistry
;
Analytical Chemistry and Spectroscopy
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Investigations by means of x-ray photoelectron spectrometry, electron probe microanalysis, x-ray fluorescence analysis, imaging x-ray fluorescence analysis, x-ray diffraction and secondary ion mass spectrometry were performed to quantify thin GexCyOz: H films. The films were prepared by r.f. plasma deposition of tetraethylgermanium in a parallel-plate system and in a two-rod discharge system with magnetron enhancement. The results of these investigations indicated that depth profiling delivers a homogeneous composition, with the exception of the outermost surface. At a constant flow-rate of tetraethylgermanium, the film density and the Ge/C atomic ration increase with increasing r.f. power density towards a maximum of 3.5 g cm-3 and 0.5, respectively. The hydrogen content does not change significantly. At low r.f. power densities there is a considerable increase in oxygen. There is no evidence for crystalline germanium carbide. Magnetron enhancement causes an increasing deposition rate and an inhomogeneous deposition in the lateral direction of the films.
Additional Material:
8 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/xrs.1300210308
