ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract A general discussion, which is valid for any angular dependence of sputtering yieldS=S(θ), concerning the interdependence between the incidence anglesθ e andθ 0, associated with quasi-stable intersections during ion erosion, is given. The object was firstly to establish the location ofθ e roots as a function ofθ 0 and secondly to identify the stationary points and general trend for the complex dependenceθ e=θ e(θ 0). The results obtained are applied to a quasi-stability analysis of some specific surface features during ion erosion. Various possible types of quasi-stable intersections (surface-surface, plane-surface, plane-plane) are reviewed from the point of view of their evolution caused by ion bombardment.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01058091
