Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
69 (1996), S. 764-766
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Carbon nitride thin films obtained by dual ion beam sputtering have been investigated by electron energy-loss spectroscopy (EELS), transmission electron microscopy, and Fourier transform infrared spectroscopy. The nitrogen content in the films depends on deposition conditions. A maximum value of N/C=0.8 has been achieved. A new peak at 286.7 eV energy loss in the C K-edge EELS spectra has been assigned to C=N bonds with C in the sp2 hybridization state. In addition, experimental evidences are presented of the formation of β-C3N4 crystallites embedded in a layer of a polymer like CNx amorphous phase. An evaluation of the experimental parameters that lead to the highest N content in the films is also included. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.117884
| Library |
Location |
Call Number |
Volume/Issue/Year |
Availability |
