ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
In situ pulsed excimer laser processing of high Tc YBa2Cu3O7−δ films on Si (100) substrates with yttria-stabilized zirconia (YSZ) buffer layers, has been carried out for the first time using a multitarget deposition system. Both YSZ and YBa2Cu3O7−δ layers were deposited sequentially using a KrF excimer laser (λ=248 nm) at substrate temperature of 650 °C. The morphology and structure of the buffer layers and YBa2Cu3O7−δ films were determined using x-ray diffraction and transmission electron microscopy techniques. The superconducting transition temperature Tc (onset) of 90 K and Tc0 (zero resistance) of 82 K were achieved for YBa2Cu3O7−δ thin films on Si with YSZ buffer layers. An interesting result of this study was that good quality, highly textured YBa2Cu3O7−δ films with the c axis perpendicular to the substrate could be grown on single crystal as well as polycrystalline textured YSZ layers deposited on silicon substrates.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.103358
